Generation of debris in water-assisted femtosecond laser drilling of silica glass

Iga, Y
Watanabe, W
Li, YD
Yan, L
Nishii, J
Itoh, K

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Publication date

January 2005

DOI

10.1149/JJAP.44.8013

Publisher

japanese journal of applied physics part 1 regular papers brief communications review papers

ISSN

0021-4922

Journal

issn:0021-4922

Abstract

We report on the generation of debris in the femtosecond laser drilling of silica glass in water. The morphology of the debris ejected from the amorphous synthesized silica is examined by scanning electron microscopy and the chemical structures are investigated by X-ray diffraction analysis and Fourier transform infrared spectroscopy.Physics, AppliedSCI(E)EI0ARTICLE118013-80154

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Generation of debris in water-assisted femtosecond laser drilling of silica glass

Abstract

Extracted data

Generation of debris in water-assisted femtosecond laser drilling of silica glass

Abstract

Extracted data

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