Synthesis of nano-crystalline diamond film in hot filament chemical vapour deposition by adding Ar

Nano-crystalline diamond films are successfully deposited on silicon substrates via. the hot filament chemical vapour deposition process using a CH4/H-2/Ar gas mixture. The as-grown films are analysed by using field emission scanning electron microscopy, micro-Raman spectroscopy and x-ray diffraction. These results show that the films consist of nano-diamond grains with sizes ranging from 10 to 100 nm, and argon is an important element in the formation of nano-crystalline diamonds.http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000166976300045&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701Physics, MultidisciplinarySCI(E)中国科学引文数据库(CSCD)15ARTICLE2286-2881