Add to ORKGIn this paper, a novel bulk micromachined on-off optical switch is proposed with the techniques of silicon-glass wafer bonding and deep reactive ion etch. The micromechanical optical switch includes a slope anchor and a beam with a shutter, in which the beam is laterally driven by electrostatic actuator. It is important to design and optimize the slope anchor to produce large shutter displacement with low driving voltage. FEM simulation with ANSY 5.5 is made to analyze the dynamic behavior of the switch. Meanwhile, the pull-in voltage is achieved by using the solution of Intellisute 4.0, from that the frequency shift is obtained. The optimization offers a reasonable design for the optical switch array based on the present fabrication techno...
Novel 2??2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining bas...
[[abstract]]This paper presents the design, fabrication and testing of a novel 1 × 4 mechanical opti...
Novel 2x2 torsion-mirror optical switch arrays with monolithically integrated fiber holding structur...
In this paper,a novel bulk micromachined on-off optical switch is proposed with the techniques of si...
In this paper, a novel bulk micromachined 1x2 optical switch with optical fibre-holding structure is...
This paper reports on an integrated mechanooptical waveguide ON-OFF switch, where an absorbing eleme...
Abstract—This paper reports on an integrated mechanooptical waveguide ON–OFF switch, where an absorb...
Abstract—A low-voltage electrostatically actuated 2 2 fiber optic switch is achieved using a stress...
This paper reports the design, fabrication, and testing of a Micro-opto-mechanical grating switch dr...
A micro-opto-mechanical 1 x 2 switch has been realised using silicon oxynitride (SiON) planar wavegu...
A micro-opto-mechanical 1 × 2 switch has been realised using silicon oxynitride (SiON) planar wavegu...
[[abstract]]This paper presents the design and characterization of the zigzag transmissive microopti...
In this paper, a novel surface and bulk hybrid micromachining process for fabricating a 16??16 elect...
[[abstract]]In this paper, a novel 2 × 2 MEMS optical switch is presented. The switch, which employs...
Planar waveguide SiON technology was used to develop an electrostatically driven micro-optomechanica...
Novel 2??2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining bas...
[[abstract]]This paper presents the design, fabrication and testing of a novel 1 × 4 mechanical opti...
Novel 2x2 torsion-mirror optical switch arrays with monolithically integrated fiber holding structur...
In this paper,a novel bulk micromachined on-off optical switch is proposed with the techniques of si...
In this paper, a novel bulk micromachined 1x2 optical switch with optical fibre-holding structure is...
This paper reports on an integrated mechanooptical waveguide ON-OFF switch, where an absorbing eleme...
Abstract—This paper reports on an integrated mechanooptical waveguide ON–OFF switch, where an absorb...
Abstract—A low-voltage electrostatically actuated 2 2 fiber optic switch is achieved using a stress...
This paper reports the design, fabrication, and testing of a Micro-opto-mechanical grating switch dr...
A micro-opto-mechanical 1 x 2 switch has been realised using silicon oxynitride (SiON) planar wavegu...
A micro-opto-mechanical 1 × 2 switch has been realised using silicon oxynitride (SiON) planar wavegu...
[[abstract]]This paper presents the design and characterization of the zigzag transmissive microopti...
In this paper, a novel surface and bulk hybrid micromachining process for fabricating a 16??16 elect...
[[abstract]]In this paper, a novel 2 × 2 MEMS optical switch is presented. The switch, which employs...
Planar waveguide SiON technology was used to develop an electrostatically driven micro-optomechanica...
Novel 2??2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining bas...
[[abstract]]This paper presents the design, fabrication and testing of a novel 1 × 4 mechanical opti...
Novel 2x2 torsion-mirror optical switch arrays with monolithically integrated fiber holding structur...