SUPERCONDUCTING CHARACTERISTICS AND EPITAXIAL-GROWTH ANALYSES OF YBA2CU3O7-X THIN-FILMS BY DIRECT-CURRENT MAGNETRON SPUTTERING

Using direct-current magnetron sputtering deposition, we have successfully prepared high-quality epitaxial YBa2Cu3O7-x thin films, on (100) and (110) ZrO2, SrTiO3 and LaAlO3 substrates. The films reached zero resistance at about 90 K and had a critical current density, J(c) (at 77 K, H = 0), above 10(6) A cm-2. Electrical measurements showed that the films had a small microwave surface resistance. The epitaxial structure of the films was studied by X-ray diffraction (XRD), Rutherford backscattering. (RBS) and channeling spectroscopy, X-ray double-crystalline diffraction and transmission electron microscopy (TEM). It was found that the c-axis of the film grown on the (1 00) substrates under optimum deposition conditions was perpendicular to the substrate surface. But on the (110) substrates, epitaxial growth was along the (110) or (103) direction. The experimental results indicate that the films had excellent superconducting properties and complete epitaxial structure.Materials Science, MultidisciplinarySCI(E)EI0ARTICLE184846-48492