OPTICAL-PROPERTIES OF SPUTTERED A1N FILMS AND COATED GAAS

In this paper we report experimental results concerning the optical properties of sputtered AlN films and GaAs coated with AlN films, and the effects of the AlN films on the optical output power-current characteristics of GaAs/GaAlAs DH light emitting diodes (LEDs). We present the results of experiments to determine the optical properties of sputtered AlN films on GaAs wafers. The refractive index is 1. 970, which is smaller than the refractive index of bulk AlN and almost the same as the refractive index of silicon nitride. The thickness of sputtered AlN films is increased with increasing sputtering time. The reflectivity of the surface of GaAs wafers coated with AlN films is measured at normal incidence monochromatic polarized light with a fixed wavelength and it agrees with the calculated value.Materials Science, MultidisciplinaryMaterials Science, Coatings & FilmsPhysics, AppliedPhysics, Condensed MatterSCI(E)EI0LETTER2L39-L4315