The Investigation of an Integrated Gas Sensor Array

A micro integrated gas sensor array has been designed and fabricated with surface micro-machining technology. The sensor array consists of four elements integrated on a chip. Two different kinds of SnO2 film were sputtered on the four sensors. Au and Pt were deposited on the surface of SnO2 film as catalysts. The four sensors can be independently controlled by separate heater and temperature sensor. When implementing the function of electronic nose, the array can well differentiate CO, NO 2 and H2S and measure the concentration of each gas without the analysis of artificial neural network.EI