The research on MEMS fang-bar fluidic angular rate sensor

Fluidic angular rate sensor is based on the principle that moving air will change its velocity distribution under the influence of Coriolis force. However, the existing fluidic angular rate sensors are fabricated with traditional machining methods, and are consequently of great volume. Thus, their uses are limited to a great extent. This paper invents a novel micromachined fluidic angular rate sensor, Fang-Bar fluidic angular rate sensor, which is fabricated with MEMS technology. Its key components are 4 Fang-Bar fluidic diodes. This paper theoretically explains the working principle of this sensor in detecting angular rate, and simulates it using finite element analysis software ANSYS, and finally presents the design of manufacturing process. ?2004 IEEE.EI