Silicon-based MEMS process and standardization

This paper, reviewing the development history of MEMS technology, summarizes the developing trend of current MEMS fabrication techniques. To realize the miniaturization and three-dimensional (3D) fabrication of MEMS device, multi-layer technique, SOI technique and integration are the main developing direction of current MEMS. Standardization is important tool of MEMS research and the standardization process covers two platforms, soft platform and hard platform, which will exert relatively large driving force to MEMS device research. ? 2004 IEEE.EI