Status of silicon carbide micromachining, circuits and sensing devices

Silicon carbide (SiC) is an attractive material for high-temperature, high-power, high-frequency applications, due to its outstanding electrical, mechanical properties, and chemical inertness. SiC semiconductor technology has been developed widely since the commercialization of 6H-SiC and 4H-SiC bulk SiC wafers in 1990s. This paper reviews the recent patents on SiC semiconductor technology, introduces the achievements both in academy and industry for micro-machining technologies, circuits devices. All these developments are driving high-performance SiC devices into harsh environment applications.? 2011 Bentham Science Publishers.EI03191-200