Uncooled multi-band IR imaging using bimaterial cantilever FPA

This paper presents the design, fabrication and performance of a 256??256 bimaterial cantilever focal plane array (FPA) which is able to work in the three infrared (IR) atmospheric windows of 1??2.5??m, 3??5??m and 8??14??m simultaneously. The FPA employs a silicon-framed structure by selectively etching away the substrate with Deep Reactive Ion Etching technique, and a stacked layer of chromium and SiNx serves as the multi-band absorber. The images of short wavelength, middle wavelength and long wavelength infrared were captured successfully with the same FPA by combining the Chromium nano-film with silicon nitride as the multi-band IR absorber. The measured sensitivity of the FPA is 0.18??m/K. ? 2014 IEEE.EICPCI-S(ISTP)