The investigation of the detection mechanism for micromachined accelerometers with gaseous proof mass

A new mechanism of acceleration detection is discussed in this paper, on the basis of which micromachined accelerometers with gaseous proof mass can be developed. The new concept of "Gas Pendulum" is introduced to theoretically explain this mechanism. Three types of macroscopic devices utilizing this mechanism are demonstrated. The experimental results show that such kind of accelerometer can measure acceleration up to 5g, and has a resolution better than 2 X 10(-4)g. The characters of this method and the prospect of its application in micromachined accelerometers are also discussed.Engineering, Electrical & ElectronicMaterials Science, MultidisciplinaryPhysics, AppliedPhysics, Condensed MatterCPCI-S(ISTP)