Add to ORKGNovel MEMS torsion-mirror actuators with monolithically integrated fiber self-holding structures, which can feature self-fixing and self-aligning of optical fibers, are fabricated, and investigated experimentally and theoretically. Their electromechanical and optical characteristics are acceptable for optical switching or attenuating applications.Instruments & InstrumentationCPCI-S(ISTP)
We report on a novel micro torsion mirror actuated by a compound electrostatic driving structure. Th...
A novel CMOS-compatible manufactured electrostatically driven torsional actuator for periodic deflec...
One dimensional torsional micro mirrors for laser steering applications have been developed and manu...
MEMS torsion-mirror actuators with monolithically integrated fiber self-holding structures, are inve...
The electromechanical characteristics of a novel micro torsion-mirror actuator are investigated. The...
Novel torsion-mirror actuators with monolithically integrated new fiber holding structures, which ca...
A new kind of torsion-mirror optical actuators with compound driving structures is reported. The adv...
In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonst...
A new kind of optical torsion-mirror components with advanced compound driving structures as well as...
Novel 2x2 torsion-mirror optical switch arrays with monolithically integrated fiber holding structur...
Novel 2??2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining bas...
Abstract — This paper reports on the design, fabrication, and performance of a novel MEMS (micro-ele...
We report an improved electrostatically-driven micro torsion mirror which is suitable to be integrat...
We report an improved electrostatically-driven micro torsion mirror which is suitable to be integrat...
A novel kind of torsion-mirror actuators with compound electrostatic driving structures is reported....
We report on a novel micro torsion mirror actuated by a compound electrostatic driving structure. Th...
A novel CMOS-compatible manufactured electrostatically driven torsional actuator for periodic deflec...
One dimensional torsional micro mirrors for laser steering applications have been developed and manu...
MEMS torsion-mirror actuators with monolithically integrated fiber self-holding structures, are inve...
The electromechanical characteristics of a novel micro torsion-mirror actuator are investigated. The...
Novel torsion-mirror actuators with monolithically integrated new fiber holding structures, which ca...
A new kind of torsion-mirror optical actuators with compound driving structures is reported. The adv...
In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonst...
A new kind of optical torsion-mirror components with advanced compound driving structures as well as...
Novel 2x2 torsion-mirror optical switch arrays with monolithically integrated fiber holding structur...
Novel 2??2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining bas...
Abstract — This paper reports on the design, fabrication, and performance of a novel MEMS (micro-ele...
We report an improved electrostatically-driven micro torsion mirror which is suitable to be integrat...
We report an improved electrostatically-driven micro torsion mirror which is suitable to be integrat...
A novel kind of torsion-mirror actuators with compound electrostatic driving structures is reported....
We report on a novel micro torsion mirror actuated by a compound electrostatic driving structure. Th...
A novel CMOS-compatible manufactured electrostatically driven torsional actuator for periodic deflec...
One dimensional torsional micro mirrors for laser steering applications have been developed and manu...