Double tuning-fork resonant accelerometer

The structure of a novel resonant accelerometer is designed and fabricated in this paper, which includes two double-ended tuning forks (DETF), a proof mass surrounding two tuning forks and extending around, four-leverage system amplifying inertial force, and drive /sense combs. Each tuning fork is electrostatically actuated and sensed at resonance using comb electrodes. When an external acceleration is applied to the device, one tuning fork is subjected to a tensile force which raises its natural frequency, and the other tuning fork experiences a compressive force, lowering its frequency. The output of the accelerometer is the frequency difference between the two tuning forks. The device has been fabricated using MEMS bulk -silicon technology, whose sensitive degree of the accelerometer sample is 27.3 Hz/g, the resolution is 167.8 mu g.Engineering, Electrical & ElectronicMaterials Science, MultidisciplinaryPhysics, Condensed MatterCPCI-S(ISTP)