A fluidic angular rate sensor fabricated using MEMS technology

This paper presents the design, analysis and fabrication of a micro fluidic angular rate sensor, the operating principle of which is based on the hot-wire anemometer and jet pump theory. The use of circulating airflow to detect angular rate makes the device free from suspended moving components such as solid proof mass, and consequently anti-overloads, and it also has the advantages of solid state, smaller size and low cost. This kind of sensor can be used in tanks, ships, missiles and many other places. The paper gives a detailed analysis of the working mechanism, and the sensor is fabricated on silicon and glass substrate using MEMS technology.Instruments & InstrumentationCPCI-S(ISTP)