FABRICATION AND CHARACTERIZATION OF PARYLENE C-CAULKED PDMS FOR LOW-PERMEABLE MICROFLUIDICS
- Lei, Y. H.
- Liu, Y. P.
- Wang, W.
- Wu, W. G.
- Li, Z. H. .
DOIAbstract
This paper proposed a simple and effective fabrication method of Parylene C-caulked PDMS (pcPDMS) for low-permeability required microfluidics applications. Parylene C was deposited into PDMS to caulk the permeable sites and then the over-deposited Parylene C on top of PDMS surface was etched off by oxygen plasma. A buffered hydro-fluoride acid treatment was adopted to recover the over-oxygen-plasma-treated PDMS surface for the following pcPDMS-pcPDMS bonding. Scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were used to characterize the Parylene C caulked status in the PDMS matrix. Dynamic diffusions of Rhodamine B inside the native PDMS and the pcPDMS were experimentally compared. The preliminary results indica...
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