A Sub 0.8 Degree per Hour Mode-matching MEMS Vibratory Gyroscope with Closed Loop Control for the Sense Mode

A detailed analysis about the nonlinearity of a mode-matching MEMS vibratory gyroscope is presented in this paper, then closed loop control for the sense mode is adopted to improved the performances. Experimental results figure out that the mode-matching gyroscope with closed loop controlled sense mode achieves a scale factor of 65mV/deg/s with nonlinearity of 0.05% and asymmetry of 0.1%, and a bias instability of 0.77deg/h, while they are 60mV/deg/s, 1%, 4.6% and 9.8deg/h in the open loop controlled sense mode system, respectively. These performances can be improved by more than one order of magnitude in the closed loop control system.http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000324503700048&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701Nanoscience & NanotechnologyMaterials Science, MultidisciplinaryEICPCI-S(ISTP)