Improved fifth-order geometric aberration coeincients of electron lenses

Liu, ZX

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Publication date

January 2004

DOI

10.1088/0022-3727/37/5/002

Publisher

journal of physics d applied physics

Journal

issn:0022-3727

Abstract

In this paper, fifth-order geometric aberrations of round electron lenses have been restudied. Improved analytical formulae of the aberration coefficients were derived by the computer algebra software-Mathematica-and their correctness verified by cross-checking with numerical integration and differential algebraic techniques for a given electromagnetic lens.Physics, AppliedSCI(E)EI3ARTICLE5653-6593

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Improved fifth-order geometric aberration coeincients of electron lenses

Abstract

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Improved fifth-order geometric aberration coeincients of electron lenses

Abstract

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