Add to ORKGThe silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper.http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000245903300011&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701Physics, MultidisciplinarySCI(E)CPCI-S(ISTP)
Two microstructuring processes are described in the paper: A high performance RIE process (STS Advan...
Micromachining and related technologies are needed to develop a large variety of sensors and actuato...
Surface Micromachining is called so because instead of crystal silicon substrate as functioning mate...
317-320The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial ...
This paper, reviewing the development history of MEMS technology, summarizes the developing trend of...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simp...
Microsystem technology introduces a new way of system integration including microelectronics, sensor...
Microsystem technology introduces a new way of system integration including microelectronics, sensor...
As silicon integrated circuits (ICs) continue their development scaling to smaller geometries there ...
As silicon integrated circuits (ICs) continue their development scaling to smaller geometries there ...
Abstract. This paper reports on the development of a new technology intended for the wafer level fab...
System integration is often by the incompatibility of technology used for the fabrication of signal ...
Smaller, lighter instruments can be fabricated as Micro-Electro-Mechanical Systems (MEMS), having mi...
Two microstructuring processes are described in the paper: A high performance RIE process (STS Advan...
Micromachining and related technologies are needed to develop a large variety of sensors and actuato...
Surface Micromachining is called so because instead of crystal silicon substrate as functioning mate...
317-320The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial ...
This paper, reviewing the development history of MEMS technology, summarizes the developing trend of...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simp...
Microsystem technology introduces a new way of system integration including microelectronics, sensor...
Microsystem technology introduces a new way of system integration including microelectronics, sensor...
As silicon integrated circuits (ICs) continue their development scaling to smaller geometries there ...
As silicon integrated circuits (ICs) continue their development scaling to smaller geometries there ...
Abstract. This paper reports on the development of a new technology intended for the wafer level fab...
System integration is often by the incompatibility of technology used for the fabrication of signal ...
Smaller, lighter instruments can be fabricated as Micro-Electro-Mechanical Systems (MEMS), having mi...
Two microstructuring processes are described in the paper: A high performance RIE process (STS Advan...
Micromachining and related technologies are needed to develop a large variety of sensors and actuato...
Surface Micromachining is called so because instead of crystal silicon substrate as functioning mate...