Electromechanical studies on micro torsion-mirror actuators with monolithically integrated fiber self-holding structures

The electromechanical characteristics of a novel micro torsion-mirror actuator are investigated. The electrostatic yielding voltages for driving the metal-coated polysilicon or single crystal silicon micro-mirrors supported by suspended torsion beams to tilt from 0degrees to 90degrees spontaneously are in the range of 270similar to290 V and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90degrees are found 55 V or so when the thickness of the torsion-beams is about 1 mum. The lifetime and the estimated shortest actuating time of the micro torsion-mirror actuators can reach 10(8) at least and less than 2 ms, respectively. The force analysis on the two kinds of new fiber self-holding structures integrated monolithically in the actuator chip indicates that the structures can feature self-fixing and self-aligning of optical fibers.Engineering, MultidisciplinaryMathematics, AppliedMechanicsPhysics, MathematicalSCI(E)CPCI-S(ISTP)