Extraordinary refractive-index increase in MeV B3+ ion-implanted LiNbO3 waveguide

Optically polished LiNbO3 was implanted by 3.0 MeV B3+ ions at room temperature, forming planar optical waveguides at a dose of 4 x 10(14) ions/cm(2), The prism-coupling method was used to take dark mode measurements. Four waveguide modes were observed for both ordinary and extraordinary light. Contrary to high-dose ion-implanted waveguides, the extraordinary refractive index was found to increase in the guide region for low-dose implantations. The reflectivity calculation method was used to reconstruct the refractive index profile in the waveguide. TRIM'98 was also used to simulate the damage distribution in the LiNbO3, (C) 2003 Elsevier B.V. All rights reserved.Instruments & InstrumentationNuclear Science & TechnologyPhysics, Atomic, Molecular & ChemicalPhysics, NuclearSCI(E)EI16ARTICLE3346-35021