Enhanced refractive index well-confined planar and channel waveguides in KTiOPO4 produced by MeV C3+ ion implantation with low dose

We report on the fabrication and characterization of planar and channel waveguides in KTiOPO4 crystals by 6.0 MeV C3+ ion implantation with the dose of 1x10(14) ions/cm(2). The dark mode spectroscopy of the planar waveguide was measured using a prism coupling arrangement. An increase of the both n (x) and n (y) refractive indices induced by the annealing after implantation is believed to be responsible for waveguide formation. The bright near-field intensity distribution of the transverse-electric and transverse-magnetic modes in the annealed channel waveguide was collected and studied by end-coupling method.OpticsPhysics, AppliedSCI(E)EI8ARTICLE2295-2999