高温压力传感器因其特殊的应用环境而日益受到人们的重视.一些特殊的材料如SiC 、SOI等可以用来制作高温压力传感器,但是由于成本较高或加工难度大等原因,尚未得到广泛应用.本文提出了一种新型的高温压力传感器,采用多晶硅作为压敏电阻,同时采用新的工艺措施与全耗尽CMOS放大电路集成在一起,将输出电压转换为0～+5V的输出信号.通过模拟与投片实验,得到了优化的多晶硅注入浓度,从而使其压阻温度系数在-40℃～180℃范围内接近于零.中文核心期刊要目总览(PKU)中国科学引文数据库(CSCD)0111736-17383
A high temperature silicon on insulator pressure sensor utilising a Ti/TiN/Pt/Au electrode is presen...
The exploitation of new application fields and the drive to size reduction even in highly stable pre...
压力传感器是在微机电系统领域最早开始研究并且产业化的微机电器件之一，微机电系统以微加工工艺为重点研究内容。本文主要对不同类型的微机电系统领域的压力传感器的相关部分进行设计和分析，并在研究相关微加工工艺...
Pressure sensor for high temperature is very useful. Some special materials such as SiC and SOI can ...
基于微机电系统（MEMS）的硅微压力传感器是最早的商业化产品之一，谐振技术的MEMS压力传感器是目前精度最高的压力测量仪器，鉴于其测量精度高、稳定性好、抗干扰性好、数字化输出等优势，因此常被应用于航空...
为提高机器人人机交互的安全性，选用一种新型智能材料—电活性聚合物材料(Electroactive polymer, EAP)作为传感器阵列单元的敏感材料，设计一种4x4柔性压力传感器阵列及...
В работе приводятся результаты исследования характеристик нового типа термодатчика на основе кремния...
分析了石化行业对压力变送器的需求,得出石化行业对压力传感器的要求:测量精度、快速响应、温度特性和静压特性、长期稳定性.微压力传感器具有许多传统压力传感器不具备的优点,能够满足石化行业对压力传感器的要求...
A novel high-temperature pressure sensor was designed based on the principle of magnetic induction. ...
In this thesis, the design and fabrication of a bulk micromachined and wafer bonded pressure sensor ...
Ultra-high pressure measurement has significant applications in various fields such as high pressure...
在3D SiP(三维系统级封装)的TSV(硅通孔)的工艺制造过程中,热应力会引发TSV周围的载流子迁移率的改变,进而改变3D系统级封装芯片的性能.针对这一问题,提出了一种TSV热应力释放槽结构,以期解...
ABSTRACT Based on Silicon on Insulator (SOI) and Micro Electro Mechanical System (MEMS) technology, ...
This paper focuses on the design and fabrication of a high-temperature piezoresistive pressure senso...
A silicon on silicon pressure sensor has been developed for use at very high temperatures (1000 F). ...
A high temperature silicon on insulator pressure sensor utilising a Ti/TiN/Pt/Au electrode is presen...
The exploitation of new application fields and the drive to size reduction even in highly stable pre...
压力传感器是在微机电系统领域最早开始研究并且产业化的微机电器件之一，微机电系统以微加工工艺为重点研究内容。本文主要对不同类型的微机电系统领域的压力传感器的相关部分进行设计和分析，并在研究相关微加工工艺...
Pressure sensor for high temperature is very useful. Some special materials such as SiC and SOI can ...
基于微机电系统（MEMS）的硅微压力传感器是最早的商业化产品之一，谐振技术的MEMS压力传感器是目前精度最高的压力测量仪器，鉴于其测量精度高、稳定性好、抗干扰性好、数字化输出等优势，因此常被应用于航空...
为提高机器人人机交互的安全性，选用一种新型智能材料—电活性聚合物材料(Electroactive polymer, EAP)作为传感器阵列单元的敏感材料，设计一种4x4柔性压力传感器阵列及...
В работе приводятся результаты исследования характеристик нового типа термодатчика на основе кремния...
分析了石化行业对压力变送器的需求,得出石化行业对压力传感器的要求:测量精度、快速响应、温度特性和静压特性、长期稳定性.微压力传感器具有许多传统压力传感器不具备的优点,能够满足石化行业对压力传感器的要求...
A novel high-temperature pressure sensor was designed based on the principle of magnetic induction. ...
In this thesis, the design and fabrication of a bulk micromachined and wafer bonded pressure sensor ...
Ultra-high pressure measurement has significant applications in various fields such as high pressure...
在3D SiP(三维系统级封装)的TSV(硅通孔)的工艺制造过程中,热应力会引发TSV周围的载流子迁移率的改变,进而改变3D系统级封装芯片的性能.针对这一问题,提出了一种TSV热应力释放槽结构,以期解...
ABSTRACT Based on Silicon on Insulator (SOI) and Micro Electro Mechanical System (MEMS) technology, ...
This paper focuses on the design and fabrication of a high-temperature piezoresistive pressure senso...
A silicon on silicon pressure sensor has been developed for use at very high temperatures (1000 F). ...
A high temperature silicon on insulator pressure sensor utilising a Ti/TiN/Pt/Au electrode is presen...
The exploitation of new application fields and the drive to size reduction even in highly stable pre...
压力传感器是在微机电系统领域最早开始研究并且产业化的微机电器件之一，微机电系统以微加工工艺为重点研究内容。本文主要对不同类型的微机电系统领域的压力传感器的相关部分进行设计和分析，并在研究相关微加工工艺...
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