A Square-Plate Ultrasonic Linear Motor Operating in Two Orthogonal First Bending Modes
- Chen, Zhijiang
- Li, Xiaotian
- Chen, Jianguo
- Dong, Shuxiang
DOIAbstract
A novel square-plate piezoelectric ultrasonic linear motor operated in two orthogonal first bending vibration modes (B-1) is proposed. The piezoelectric vibrator of the linear motor is simply made of a single PZT ceramic plate (sizes: 15 x 15 x 2 mm) and poled in its thickness direction. The top surface electrode of the square ceramic plate was divided into four active areas along its two diagonal lines for exciting two orthogonal B-1 modes. The achieved driving force and speed from the linear motor are 1.8 N and 230 mm/s, respectively, under one pair orthogonal voltage drive of 150 Vp-p at the resonance frequency of 92 kHz. The proposed linear motor has advantages over conventional ultrasonic linear motors, such as relatively larger drivin...
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