Decoupled Comb Capacitors for Microelectromechanical Tuning-Fork Gyroscopes

Guo, Z. Y.
Yang, Z. C.
Lin, L. T.
Zhao, Q. C.
Cui, J.
Chi, X. Z.
Yan, G. Z.

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Publication date

January 2010

DOI

10.1109/LED.2009.2035143

Publisher

ieee electron device letters

ISSN

0741-3106

Journal

0741-3106

Abstract

This letter presents a novel comb capacitor which can decouple the mechanical crosstalk between the sensing and driving modes of gyroscopes. The capacitance and electrostatic force of the comb capacitor are simulated and analyzed to verify the decoupling principle. A lateral-axis tuning-fork gyroscope is used successfully to demonstrate the decoupling capability of the comb capacitor, resulting in a nonlinearity of 0.6% with full scale of 1000 degrees/s and a bias stability of 0.05 degrees/s (1 sigma) for 30 min.http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000273090800010&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701Engineering, Elect...

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Decoupled Comb Capacitors for Microelectromechanical Tuning-Fork Gyroscopes

Abstract

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Decoupled Comb Capacitors for Microelectromechanical Tuning-Fork Gyroscopes

Abstract

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