Add to ORKGAccurate knowledge of mechanical and thermal properties of structural materials used in MEMS is essential for optimum geometric and functional design. The extraction of precise physical properties is rather complicated due to the size effects, the complexity of the structures and the variations of formation processes. This work is intended to determine the thermal properties of silicon-nitride and diamond layers applied in thermal sensor structures by analyzing thermal responses of a multilayer micro-heater structure
We present different optical techniques to characterize Micro-Electro-Mechanical Systems (MEMS) comp...
Three low pressure micro-resistojets (LPM) with integrated heater and temperature measurement were d...
In the sensors field the active sensing material frequently needs a controlled temperature in order ...
Accurate knowledge of mechanical and thermal properties of structural materials used in MEMS is esse...
Microelectromechanical systems (MEMS) have potential application in high temperature environments su...
This thesis explores the employment of monocrystalline silicon in microsystems as an active material...
A simple compact temperature sensor and microheater in a wide temperature range has been developed, ...
There are several possibilities for creating temperature sensors. Different principles and technolog...
A detailed thermal modeling study of the micromachined micro-hotplate (MHP) using three-dimensional ...
The optimization of microelectronic devices and Microelectromechanical Systems (MEMS) technology dep...
This work describes the results of a systematic investigation of micro-hotplates capable of operatin...
The application of commercial mechanical computer-aided engineering (MCAE) software to the design an...
This thesis aims to characterize microcantilevers with integrated heater-thermometers. This research...
In this paper comparative analysis of MEMS (Micro-electro-mechanical System) based Micro-hotplate us...
The application of commercial Mechanical Computer Aided Engineering (MCAE) software on the design an...
We present different optical techniques to characterize Micro-Electro-Mechanical Systems (MEMS) comp...
Three low pressure micro-resistojets (LPM) with integrated heater and temperature measurement were d...
In the sensors field the active sensing material frequently needs a controlled temperature in order ...
Accurate knowledge of mechanical and thermal properties of structural materials used in MEMS is esse...
Microelectromechanical systems (MEMS) have potential application in high temperature environments su...
This thesis explores the employment of monocrystalline silicon in microsystems as an active material...
A simple compact temperature sensor and microheater in a wide temperature range has been developed, ...
There are several possibilities for creating temperature sensors. Different principles and technolog...
A detailed thermal modeling study of the micromachined micro-hotplate (MHP) using three-dimensional ...
The optimization of microelectronic devices and Microelectromechanical Systems (MEMS) technology dep...
This work describes the results of a systematic investigation of micro-hotplates capable of operatin...
The application of commercial mechanical computer-aided engineering (MCAE) software to the design an...
This thesis aims to characterize microcantilevers with integrated heater-thermometers. This research...
In this paper comparative analysis of MEMS (Micro-electro-mechanical System) based Micro-hotplate us...
The application of commercial Mechanical Computer Aided Engineering (MCAE) software on the design an...
We present different optical techniques to characterize Micro-Electro-Mechanical Systems (MEMS) comp...
Three low pressure micro-resistojets (LPM) with integrated heater and temperature measurement were d...
In the sensors field the active sensing material frequently needs a controlled temperature in order ...