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Temperature Measurement of Sub-micrometric ICs by Scanning Thermal Microscopy

Nepveu, F.
Trannoy, N.
Volz, S.
Charlot, B.
Tessier, G.
Dilhaire, S.
Cretin, B.
Vairac, P.
Gomès, S.
Chapuis, O.

Publication date

January 2006

Publisher

TIMA Editions , Grenoble, France

Abstract

Scanning Thermal Microscopy Temperature measurement Thermal analysis techniques Thermal-resistive prob

Extracted data

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Shea, H.
Briand, D.

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