Thermal imaging of Si, GaAs AND GaN -based devices within the microtherm project

Within the european project Microtherm, we have developed a CCD-based thermoreflectance system which delivers thermal images of working integrated circuits with high spatial and thermal resolutions (down to 350 nm and 0.1 K respectively). We illustrate the performances of this set-up on several classes of semiconductor devices including high power transistors and transistor arrays in silicon, gallium arsenide and gallium nitride technologies