Infusion Micro-Pump Development Using MEMS Technology

International audienceDiabetes is a chronic condition that occurs when the pancreas does not produce enough insulin or when the body cannot effectively use the insulin it produces. People having type 1 diabetes require insulin (10% of all diabetics). People with type 2 diabetes can be treated with oral medication, but may also require insulin; 10% of all type 2 diabetics require insulin. Among the actual different methods to administer insulin (syringes, pens and conventional infusion pumps) a possibility to increase infuser performances is offered by the utilization of silicon based MEMS pumps (Micro- Electro Mechanical Systems). The main two pump families are classified as mechanical and non-mechanical pumps. The former contains check-valve, peristaltic, rectification without valves and rotary ones (“Displacement Pumps”) or Ultrasonic and Centrifugal (“Dynamic Pumps”); the latter consists in Pressure, Concentration, Electrical Potential gradients and Magnetic Potential micro-pumps. The micro-pump described here is an electro-mechanical device actuated with a piezoelectric-element and based on MEMS technology, able to minimize size and costs, offering a high precision pharmacological dispense. Three slices are bonded to reach the final results: top and bottom caps and an intermediate SOI. In case of anodic bonding, top and bottom caps are constituted of micromachined borophosphosilicate wafers, whereas in case of metallic bonding three silicon slices are used. The paper deals with the fabrication evolution of the device according to the different items that had to be faced during development: design, fluidic, mechanical and electrical simulations and characterization, safety requirements and final testing. Built-in reliability is ensured by two inner sensors able to detect any occlusion or malfunctioning and informing so the patient. The result is a compact, core pump chip that can deliver from 0.02 Units of insulin up to 3.6 Units per minute with accuracy better than 5%