Add to ORKGHere we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of multiple thickness.A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensor
Photoacoustic spectroscopy (PAS) as a measurement method for trace gas detection has the inherent pr...
This paper deals with the design optimization of new high sensitivity microphones in SOI technology ...
textDirectional microphones, which suppress noise coming from unwanted directions while preserving s...
Here we present the design and modeling of a novel piezoresistive microphone designed for a photoaco...
AbstractThe photoacoustic principle for measuring gas concentration is well established based upon m...
The photoacoustic principle for measuring gas concentration is well established based upon macromech...
For the first time silicon microphone specially designed for measurements in turbulence gas flows ha...
Novel, highly sensitive piezoelectric acoustic sensors based on partially unclamped Pb(Zr-x, Ti1-x)O...
The detection of methane, a strong greenhouse gas, has increased in importance due to rising emissio...
Downsizing and compatibility with MEMS silicon foundries is an attractive path towards a large diffu...
This paper presents a design and fabrication process flow of silicon nanowire (SiNW)-based micro-ele...
Piezoresistive microphones have been designed and fabricated using surface micromachining technology...
The modeling, construction and characterization of a piezoresistive areo-acoustic microphone are rep...
This paper deals with the design optimization of new high sensitivity microphones in SOI technology ...
International audienceElectret microphones dedicated to consumer electronics (mobile phone) and medi...
Photoacoustic spectroscopy (PAS) as a measurement method for trace gas detection has the inherent pr...
This paper deals with the design optimization of new high sensitivity microphones in SOI technology ...
textDirectional microphones, which suppress noise coming from unwanted directions while preserving s...
Here we present the design and modeling of a novel piezoresistive microphone designed for a photoaco...
AbstractThe photoacoustic principle for measuring gas concentration is well established based upon m...
The photoacoustic principle for measuring gas concentration is well established based upon macromech...
For the first time silicon microphone specially designed for measurements in turbulence gas flows ha...
Novel, highly sensitive piezoelectric acoustic sensors based on partially unclamped Pb(Zr-x, Ti1-x)O...
The detection of methane, a strong greenhouse gas, has increased in importance due to rising emissio...
Downsizing and compatibility with MEMS silicon foundries is an attractive path towards a large diffu...
This paper presents a design and fabrication process flow of silicon nanowire (SiNW)-based micro-ele...
Piezoresistive microphones have been designed and fabricated using surface micromachining technology...
The modeling, construction and characterization of a piezoresistive areo-acoustic microphone are rep...
This paper deals with the design optimization of new high sensitivity microphones in SOI technology ...
International audienceElectret microphones dedicated to consumer electronics (mobile phone) and medi...
Photoacoustic spectroscopy (PAS) as a measurement method for trace gas detection has the inherent pr...
This paper deals with the design optimization of new high sensitivity microphones in SOI technology ...
textDirectional microphones, which suppress noise coming from unwanted directions while preserving s...