We investigate the etching of a pure hydrogen plasma on graphite samples and graphene flakes on SiO2 and hexagonal boron-nitride substrates. The pressure and distance dependence of the graphite exposure experiments reveals the existence of two distinct plasma regimes: the direct and the remote plasma regime. Graphite surfaces exposed directly to the hydrogen plasma exhibit numerous etch pits of various size and depth, indicating continuous defect creation throughout the etching process. In contrast, anisotropic etching forming regular and symmetric hexagons starting only from preexisting defects and edges is seen in the remote plasma regime, where the sample is located downstream, outside of the glowing plasma. This regime is possible in a ...
International audienceTo assist the development of plasma processes to pattern graphene in a control...
We study a crystallographic etching process of graphene nanostructures, where zigzag edges can be pr...
Graphène est un matériau bidimensionnel unique physique, chimique et les propriétés mécaniques. Il p...
We investigate the etching of a pure hydrogen plasma on graphite samples and graphene flakes on SiO2...
Magnetic ordering in low dimensional semiconducting structures is an important element for spin-base...
Metal nanoparticles and H2 induced etching of graphene are of significant interest to synthesise gra...
We report a simple, clean, and highly anisotropic hydrogen etching method for chemical vapor deposit...
We study the effect of remote hydrogen plasma on graphene deposited on SiO<sub>2</sub>. We observe s...
We investigate the quality of hydrogen plasma defined graphene edges by Raman spectroscopy, atomic r...
We report the hydrogenation of single and bilayer graphene by an argon-hydrogen plasma produced in a...
Graphene is attracting vast interest due to its superior electronic and mechanical properties. Howev...
Herein is reported a study of Co-assisted crystallographic etching of graphite in hydrogen environme...
Edge engineering is important for both fundamental research and applications as the device size decr...
We demonstrate anisotropic etching of single-layer graphene by thermally activated nickel nanopartic...
We study the selective preparation of graphene zigzag edges by crystallographically anisotropic etch...
International audienceTo assist the development of plasma processes to pattern graphene in a control...
We study a crystallographic etching process of graphene nanostructures, where zigzag edges can be pr...
Graphène est un matériau bidimensionnel unique physique, chimique et les propriétés mécaniques. Il p...
We investigate the etching of a pure hydrogen plasma on graphite samples and graphene flakes on SiO2...
Magnetic ordering in low dimensional semiconducting structures is an important element for spin-base...
Metal nanoparticles and H2 induced etching of graphene are of significant interest to synthesise gra...
We report a simple, clean, and highly anisotropic hydrogen etching method for chemical vapor deposit...
We study the effect of remote hydrogen plasma on graphene deposited on SiO<sub>2</sub>. We observe s...
We investigate the quality of hydrogen plasma defined graphene edges by Raman spectroscopy, atomic r...
We report the hydrogenation of single and bilayer graphene by an argon-hydrogen plasma produced in a...
Graphene is attracting vast interest due to its superior electronic and mechanical properties. Howev...
Herein is reported a study of Co-assisted crystallographic etching of graphite in hydrogen environme...
Edge engineering is important for both fundamental research and applications as the device size decr...
We demonstrate anisotropic etching of single-layer graphene by thermally activated nickel nanopartic...
We study the selective preparation of graphene zigzag edges by crystallographically anisotropic etch...
International audienceTo assist the development of plasma processes to pattern graphene in a control...
We study a crystallographic etching process of graphene nanostructures, where zigzag edges can be pr...
Graphène est un matériau bidimensionnel unique physique, chimique et les propriétés mécaniques. Il p...