MICROPUMP WITH ELECTROSTATIC ACTUATION

A micropump includes: a pumping chamber (20), between a first semiconductor substrate (7) and a second semiconductor substrate (8) bonded to each other; an inlet valve (21), having an inlet shutter element (27) between an inlet passage (18) and the pumping chamber (20); an outlet valve (22), having an outlet shutter element (33) between the pumping chamber (20) and an outlet passage (19); a first recess (28) for housing the inlet shutter element (27) when the inlet valve (21) is in the open configuration, the first recess (28) and the pumping chamber (20) being fluidly coupled; a second recess (35) for housing the outlet shutter element (33) when the outlet valve (22) is in the open configuration, the second recess (35) and the pumping chamber (20) being fluidly decoupled