Development of an ultra precision machine tool for micro machining

The development of micro-fabrication has gone through a long periodof evolution. The application of micro scale components has beenenormous growth over recent years in not only micro-electro mechanicalsystem (MEMS), micro-optical applications and micro-chemicalapplications but also biotechnology, industry and daily life applications.However, an effective mechanical micro machining method hasnot yet been in market or in industry.This thesis presents the development of a micro-machining researchset-up through the design of the mechanical system, electrical andelectronic hardware and the control system. The developed systemalso has an integrated machining visualization system. The micro machiningcarried out on the developed system is also presented. Specialattention has been paid to the cut quality including the burr formation,chip formation, finished surface. Experiments have been doneusing different materials such as copper, aluminum, silica, titaniumand platinum