Preparation of Site Specific Atom Probe Tips using Focused Ion Beam Technology
- McKenzie, Warren, Materials Science & Engineering, Faculty of Science, UNSW
- McGrouther, Damien, Materials Science & Engineering, Faculty of Science, UNSW
- Munroe, Paul, Materials Science & Engineering, Faculty of Science, UNSW
- Saxey, David, University of Sydney
- Marceau, Ross, University of Sydney
- Ringer, Simon, University of Sydney
DOI Publisher
Cambridge University Press (CUP)Abstract
Specimen preparation for Atom Probe Tomography is a demanding process particularly if the features of interest are site specific. The Focused Ion Beam is evolving as a useful tool for the fabrication of such samples. This paper presents a new approach to fabricate site specific atom probe samples using a Focused Ion Beam instrument
Add to ORKG