Influence of Cu Content on the Structure, Mechanical, Friction and Wear Properties of VCN–Cu Films

VCN–Cu films with different Cu contents were deposited by reactive magnetron sputtering technique. The films were evaluated in terms of their microstructure, elemental composition, mechanical, and tribological properties by X-ray diffraction (XRD), energy-dispersive X-ray spectroscopy (EDS), high resolution transmission electron microscopy (HR-TEM), Raman spectrometry, nano-indentation, field emission scanning electron microscope (FE-SEM), Bruker three-dimensional (3D) profiler, and high-temperature ball on disc tribo-meter. The results showed that face-centered cubic (fcc) VCN, hexagonal close-packed (hcp) V2CN, fcc-Cu, amorphous graphite and CNx phases co-existed in VCN–Cu films. After doping with 0.6 at.% Cu, the hardness reached a maximum value of ~32 GPa. At room temperature (RT), the friction coefficient and wear rate increased with increasing Cu content. In the temperature range of 100–500 °C, the friction coefficient decreased, but the wear rate increased with the increase of Cu content