Thermal study of an indium trisguanidinate as a possible indium nitride precursor

Tris-N,N,-dimethyl-N,N -diisopropylguanidinatoindium(III) has been investigated both as a chemical vapor deposition precursor and an atomic layer deposition precursor. Although deposition was satisfactory in both cases, each report showed some anomalies in the thermal stability of this compound, warrenting further investigation, which is reported herein. The compound was found to decompose to produce diisopropylcarbodiimide both by computational modeling and solution phase nuclear magnetic resonance characterization. The decomposition was shown to have an onset at approximately 120 degrees C and had a constant rate of decomposition from 150 to 180 degrees C. The ultimate decomposition product was suspected to be bisdimethylamidoN, N,-dimethyl-N,N -diisopropylguanidinato-indium(III), which appeared to be an intractable, nonvolatile polymer. Published by the AVS.Funding Agencies|Swedish foundation for Strategic Research through the project "Time-resolved low temperature CVD for III-nitrides" [SSF-RMA15-0018]; COST Action [MP1402]; COST (European Cooperation in Science and Technology); Vinnova VINNMER Marie Curie incoming mobility program (Vinnova Grant) [2015-03714]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO Mat LiU) [2009 00971]; Swedish Research Council (VR Grant) [2016-05137_4]; Wenner-Gren foundations