A bistable, self-latching inverter by the monolithic integration of resonant tunnelling diode and high electron mobility transistor
- Ma L (Ma Long)
- Huang YL (Huang Ying-Long)
- Zhang Y (Zhang Yang)
- Yang FH (Yang Fu-Hua)
- Wang LC (Wang Liang-Chen)
- Ma, L, Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China. E-mail: malong@semi.ac.cn
DOIAbstract
This paper reports that the structures of AlGaAs/InGaAs high electron mobility transistor (HEMT) and AlAs/GaAs resonant tunnelling diode (RTD) are epitaxially grown by molecular beam epitaxy ( MBE) in turn on a GaAs substrate. An Al0.24Ga0.76As chair barrier layer, which is grown adjacent to the top AlAs barrier, helps to reduce the valley current of RTD. The peak-to-valley current ratio of fabricated RTD is 4.8 and the transconductance for the 1-mu m gate HEMT is 125mS/mm. A static inverter which consists of two RTDs and a HEMT is designed and fabricated. Unlike a conventional CMOS inverter, the novel inverter exhibits self-latching property
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