A microtechnology-based sensor system for deepwater analysis from a miniaturized submersible

The aim of this master thesis has been to design, and partly manufacture and evaluate, a highly miniaturized, on-chip conductivity-temperature-depth (CTD) sensor system for deepwater analysis also including electrodes for pH and chloride ion concentration measurements. The microtechnology-based sensor system will be a vital instrument onboard the Deeper Access, Deeper Understanding submersible, which will be small enough for deployment through bore holes into the subglacial lakes of Antarctica. Design of the complete 15 x 30 mm chip, including variations of each sensor type (in total 39 sensors), is presented. Salinity (through conductivity), temperature, chloride ion concentration and pH sensors have been manufactured using conventional lithography, evaporation, wet etching and lift off techniques. Simulations of the pressure sensors (not manufactured) show how the set of four bossed membranes with integrated strain gauges combine to cover, yet withstand, pressures of 1-100 atm. Salinity is measured conductively with gold electrodes. The temperature sensor is a platinum thermoresistor. Chloride ion concentration and pH are measured potentiometrically with ion-selective microelectrodes of silver/silver chloride and iridium oxide, respectively. Tests of the conductivity sensor gave good results also on sea water samples of known salinity. The temperature sensor showed good linearity to a reference sensor in the tested range of 5-35 C. Issues with evaporation and lift off are discussed, and a process identification document is attached.DAD