Microscale Ceramic Pressure Sensor Element for a Carbon Isotope Analysis System for Planetary Exploration : – Design, Manufacturing and Characterization

This master thesis examines the design, manufacturing and characterization of a miniaturized ceramic pressure gauge to be integrated into a system for carbon isotope analysis. Carbon isotope analysis can be used to find traces of extraterrestrial life. Screen printing, platinum bond wire threading, milling, lamination and sintering processes have been developed in order to manufacture a robust, temperature stable and chemically inert component potentially integratable to the carbon isotope analysis system. With use of the Pirani principle, which measures the pressure dependent thermal conductivity of air, promising results have been observed. A relative resistance change of 6 % within the pressure range of 1-10 Torr has been observed. This is comparable to, and even greater than, previous studies. The device has a good response for the desired pressure range. The device sensitivity was studied with different currents and geometric parameters. The results showed that the sensitivity is highly dependent on current and air volume. The work has been done at the Ångström Space Technology Centre –­­ a research group within the Ångström Laboratory, Uppsala University – which currently researches on microscale systems for, e.g., space exploration