Shape Control of Ag Nanostructures for Practical SERS Substrates

Large-area, highly ordered, Ag-nanostructured arrays with various geometrical features were prepared for use as surface-enhanced Raman scattering (SERS)-active substrates by the self-assembly of inorganic particles on an SU-8 surface, followed by particle embedding and Ag vapor deposition. By adjusting the embedding time of the inorganic particles, the size of the Ag nanogap between the geometrically separated hole arrays and bowl-shaped arrays could be controlled in the range of 60 nm to 190 nm. More importantly, the SU-8 surface was covered with hexagonally ordered nanopillars, which were formed as a result of isotropic dry etching of the interstices, leading to triangular-shaped Ag plates on nanopillar arrays after Ag vapor deposition. The size and sharpness of the triangular Ag nanoplates and nanoscale roughness of the bottom surface were adjusted by controlling the etching time. The potential of the various Ag nanostructures for use as practical SERS substrates was verified by the detection of a low concentration of benzenethiol. Finite-difference time-domain (FDTD) methodology was used to demonstrate the SERS-activities of these highly controllable substrates by calculating the electric field intensity distribution on the metallic nanostructures. These substrates, with high sensitivity and simple shape-controllability, provide a practical SERS-based sensing platform