????????? p??? TaON ?????? ?????? ??? ?????? ??????

????????? ????????? ???????????? ????????? Thin Film Transistor??? ????????? ???????????? LCD??? OLED??? ????????? ????????? ???????????? ???????????? ??????. ????????? ???????????? ????????? n??? ????????? ???????????? ?????? ???????????? p??? ????????? ???????????? ?????? ????????? n?????? ?????? ????????? ???????????? ????????? ??????. ????????? ????????? p??? ????????? ???????????? delafossite ????????? ?????? CuAlO2?????? ????????? SnO?????? ???????????? ??????. ????????? ????????? ?????? ?????????????????? ?????? ION/OFF ???, ?????? Off current??? ?????? TFT??? ??????????????? ???????????? ????????? ?????????. ?????? AMLCD??? AMOLED?????? n??? ???????????? p??? ???????????? ?????? ????????? CMOS??? ???????????? ???????????? p??? ????????? ???????????? ???????????? ????????? ????????????. ?????? ???????????? ????????? ??? ????????? ????????? ????????? p??? ????????? ????????? ????????? ?????? ????????? ????????? ???????????????. ?????????????????? ???????????? ?????????????????? ???????????? ????????? ????????? ????????? ?????? ????????????. Tantalum ????????? Nitrogen, Oxygen gas??? ???????????? ?????? ????????? 300 ~ 500??C??? ??????????????? p??? ????????? ????????? ???????????????. ??? TaON??? ???????????? 203 cm2/Vs ??????, ???????????? +5.77??1013?????? +2.42??1015 cm-3?????? ???????????????. ????????? ??? TaON??? ?????? ?????????, ????????? ????????? ????????? ?????? ??? ????????? ???????????????.Maste