Analysis of Power Spectra of High-Resolution Electron-Micrographs

Power spectra of a series of high resolution electron microscope images of a thin foil of crystalline silicon are compared with theoretical predictions based on the standard theory for scattering and imaging of electrons. The differences between theoretical and experimental power spectra appear to be due to inexact knowledge of experimental parameters rather than limitations of the theory. Examination of a number of theoretical power spectra leads to an estimate of the optical parameters of the microscope although not with the same precision that can be achieved using an amorphous region of the specimen