Microfluidic Optical Shutter Flexibly x-y Actuated via Electrowetting-on-Dielectrics with <20 ms Response Time

Tunable microoptics deals with devices of which the optical properties can be changed during operation without mechanically moving solid parts. Often a droplet is actuated instead, and thus tunable microoptics is closely related to microfluidics. One such device/module/cell type is an optical shutter, which is moved in or out of the path of the light. In our case the transmitting part comprises a moving transparent and electrically conductive water droplet, embedded in a nonconductive blackened oil, that is, an opaque emulsion with attenuation of 30 dB at 570 nm wavelength over the 250 μm long light path inside the fluid (15 dB averaged over the visible spectral range). The insertion loss of the cell is 1.5 dB in the “open shutter” state. The actuation is achieved via electrowetting-on-dielectrics (EWOD) with rectangular AC voltage pulses of 2·90 V peak-to-peak at 1 kHz. To flexibly allow for horizontal, vertical, and diagonal droplet movement in the upright x-y plane, the contact structures are prepared such that four possible stationary droplet positions exist. The cell is configured as two capacitors in series (along the z axis), such that EWOD forces act symmetrically in the front and back of the 60 nl droplet with a response time of