Principle Research on a Novel Piezoelectric 12-DOF Force/Acceleration Sensor

This study proposes a new piezoelectric 12-DOF force/acceleration sensor structure to measure forces, torques, and accelerations, during a robot’s space motion. The study involves analyzing the operating principle and structural characteristics in order to obtain the model structure of a sensor. The mechanical diagram of the sensor was drawn based on the structural parameters of a piezoelectric 12-DOF force/acceleration sensor, and a numerical simulation model was established. The sensor utilizes piezoelectric quartz, of different cutting types, as the sensing and conversion element. Additionally, ANSYS was used to study the static sensitivity, crossing couplings, natural frequency, and other characteristics. The research results indicate that the piezoelectric 12-DOF force/acceleration sensor has many advantages, which include a simple structure, high integration, good linearity, and dynamic characteristics. The sensor’s operating principle is accurate, and the crossing couplings correspond to linear coupling. The results of the static characteristic analysis are consistent with the structural model. The natural frequencies exceed 11 kHz, and the relative errors of output data are less than 1%, with respect to the decoupling calculation