Add to ORKGSummary: In this paper we present an integrated atom chip design which incorporates a micromachined electrostatic actuator for optical cavity alignment. The two-dimensional actuator is fabricated by applying deep reactive ion etching techniques (DRIE) on a silicon-on-glass wafer. An actuation of 17.5 µm is achievable which is sufficient to compensate for the misalignment of the optical cavity during the fabrication process
We demonstrate the novel design of an electrostatic micro-actuator based on monolithic three-dimensi...
Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the e...
Abstract—Electrostatic comb microactuators have had a fun-damental limitation in that the allowable ...
A micromachined three-dimensional electrostatic actuator that is optimized for aligning and tuning o...
A micromachined three-dimensional electrostatic actuator that is optimized for aligning and tuning ...
AbstractElectrostatic actuation is a promising approach to compensate for misalignment of bonded, mu...
The ability to fabricate micro scale structures with three dimensional features can augment the desi...
The development of novel experimental techniques in atomic physics is allowing for the manipulation ...
This paper presents a fabrication process that integrates polysilicon surface micromachining and dee...
A new geometry of high-force electrothermal actuator is demonstrated using microelectromechanical sy...
This work reports the design and opto-mechanical characterization of high velocity comb-drive actuat...
This paper introduces the development of a new MEMS-based optical mirror, which performs optical sca...
This paper introduces the development of a new MEMS-based optical mirror, which performs optical sca...
A MEMS based in-plane fibre optic alignment device based on a scalable folded buckling mode electro-...
A MEMS based in-plane fibre optic alignment device based on a scalable folded buckling mode electro-...
We demonstrate the novel design of an electrostatic micro-actuator based on monolithic three-dimensi...
Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the e...
Abstract—Electrostatic comb microactuators have had a fun-damental limitation in that the allowable ...
A micromachined three-dimensional electrostatic actuator that is optimized for aligning and tuning o...
A micromachined three-dimensional electrostatic actuator that is optimized for aligning and tuning ...
AbstractElectrostatic actuation is a promising approach to compensate for misalignment of bonded, mu...
The ability to fabricate micro scale structures with three dimensional features can augment the desi...
The development of novel experimental techniques in atomic physics is allowing for the manipulation ...
This paper presents a fabrication process that integrates polysilicon surface micromachining and dee...
A new geometry of high-force electrothermal actuator is demonstrated using microelectromechanical sy...
This work reports the design and opto-mechanical characterization of high velocity comb-drive actuat...
This paper introduces the development of a new MEMS-based optical mirror, which performs optical sca...
This paper introduces the development of a new MEMS-based optical mirror, which performs optical sca...
A MEMS based in-plane fibre optic alignment device based on a scalable folded buckling mode electro-...
A MEMS based in-plane fibre optic alignment device based on a scalable folded buckling mode electro-...
We demonstrate the novel design of an electrostatic micro-actuator based on monolithic three-dimensi...
Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the e...
Abstract—Electrostatic comb microactuators have had a fun-damental limitation in that the allowable ...