Design and simulation of a spring-less micro switch

This paper reports on the design of an ultra low actuation voltage microelectromechanical systems (MEMS) switch. The mechanical design of the spring-less switch is presented. The theoretical actuation voltage of the switch is shown to be as low as 0.34 V. The concept is tested using an electrostatic levitated disc accelerometer, reconfigured to operate as a MEMS switch. Experimental and theoretical data for the dynamic behaviour of these devices are also presented. The results of this paper validate the feasibility of realising ultra low-voltage MEMS switches using electrostatic levitation. Key words: Low actuation voltage, microelectromechanical systems (MEMS) switches, electrostatic actuation, no mechanical spring