Intrinsic Electron Mobility Exceeding 10³ cm²/(V s) in Multilayer InSe FETs

Graphene-like two-dimensional (2D) materials not only are interesting for their exotic electronic structure and fundamental electronic transport or optical properties but also hold promises for device miniaturization down to atomic thickness. As one material belonging to this category, InSe, a III–VI semiconductor, not only is a promising candidate for optoelectronic devices but also has potential for ultrathin field effect transistor (FET) with high mobility transport. In this work, various substrates such as PMMA, bare silicon oxide, passivated silicon oxide, and silicon nitride were used to fabricate multilayer InSe FET devices. Through back gating and Hall measurement in four-probe configuration, the device’s field effect mobility and intrinsic Hall mobility were extracted at various temperatures to study the material’s intrinsic transport behavior and the effect of dielectric substrate. The sample’s field effect and Hall mobilities over the range of 20–300 K fall in the range of 0.1–2.0 × 10³ cm²/(V s), which are comparable or better than the state of the art FETs made of widely studied 2D transition metal dichalcogenides