Research on the atomic force microscopy-based fabrication of nanochannels on silicon oxide surfaces

The atomic force microscopy (AFM)-based nanomachining of nanochannels on silicon oxide surfaces is investigated both theoretically and experimentally. The relationships of nanochannel depth versus cutting velocity, nanochannel depth versus normal force, friction force versus cutting velocity, and friction force versus normal force are systematically studied. Using the derived theory and fabrication method, a nanochannel with an expected depth can be machined simply by controlling the vertical deflection signal on the position sensitive detector of AFM. The theoretical analysis and fabrication method can be effectively used for AFM-based fabrication of nanochannels