Chemical vapor deposition of barium strontium titanate thin films by the direct liquid injection of Ba(methd)(2), Sr(methd)(2), and Ti(mpd)(tmhd)(2) without solvent

Chemical vapor deposition of barium strontium titanate (BST) thin films by the direct liquid injection of viscous liquid mixture of Ba(methd)(2) (methd = methoxyethoxy tetramethylheptanedionate), Sr(methd)(2), and Ti(mpd)(tmhd)(2) (mpd = methylpentanediol, tmhd = tetramethylheptanedionate) was studied. The viscosity of Ba(methd)(2) was drastically reduced to about 120 cp at 120 degrees C and similar behavior was observed in Sr(methd)(2) and Ti( mpd)(tmhd)(2). By lowering the viscosity through the heating of the liquid injection part at 110 degrees C, the liquid mixture of Ba(methd)(2), Sr(methd)(2), and Ti(mpd)(tmhd)(2) was successfully transported to the flash vaporizer. Ti incorporation into the BST thin film was changed as a function of the deposition temperature, but Ba and Sr incorporation was almost constant. The carbon content in the BST film was below the X-ray photoelectron spectroscopy detection limit and the step coverage was about 70% at the deposition temperature of 480 degrees C. (C) 1999 The Electrochemical Society. S1099-0062(99)04-001-8. All rights reserved.open119sciescopu