Study on barium strontium titanate thin films integrated on Si substrates by laser molecular beam epitaxy

2nd International Conference on Multi-Functional Materials and Structures, MFMS-2009, Qingdao, 9-12 October 2009(Ba,Sr)TiO3 thin film has been deposited on Si (001) wafer with the SiO2 layer as the block layer through laser molecular-beam epitaxy using an ultra thin Sr layer as template. X-ray diffraction measurements and the cross-sectional observations under transmission electron microscope indicated that BST was well crystallized. This deposition of Sr layer is considered to remove the thin SiO2 layer to produce a layer, which is crystallized and has a lattice structure matching with that of perovskite BST. The maximum in-plane dielectric tunability is calculated to be 50% at 1 GHz under a moderate DC bias field of 13.3 V/μm. This BST/Si structure is believed to be a promising candidate in the development of ferroelectric BST-based microwave devices.Department of Applied Physic