Self-aligned VCSEL-microlens scanner with large scan range

This paper reports on the design, fabrication and optical characterization of a self-aligned microlaser scanning system consisting of a vertical cavity surface emitting laser (VCSEL) source and a MEMS-actuated microlens scanner. The alignment and the spacing between the VCSEL and the MEMS scanner are achieved through lithographically patterned alignment grooves and precision micro-beads. Horizontal displacements of ±70 μm, corresponding to scanning angles of ±7°, have been demonstrated